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Tokyo Electron Tel Wafer Test Equipment Precio nano Precio
Specification
Tokyo Electron Tel Wafer Test Equipment Precio nano Precio
Precio nano™ is a 300mm wafer prober that realizes high accuracy contact and cleanness under high load. In the probing process, demand for probing technology has diversified as process miniaturization, high function/high integration devices and packages are changing. The Precio nano™ and Precio™ not only has improved XY accuracy but also has greater Z precision/Z control methods for a more stable contact. Because of the increase in one-touch contact measurement of FLASH memory and increasing of simultaneous measurements of DRAM, there is a demand to improve the parallelism between the probe card and the chuck top. Precio nano™/Precio™ inherits the P-12 XL functions of parallel probing to respond to various demands with the concept to further reducing test costs. In addition, by installing the probe mark inspection module TELPADS™-I (Option), high-speed probe mark inspection is available.
Precio nano
Precio octo
Precio
Wafer size (mm)
200,300
150,200
200,300
Availability
New, used
New, used
New, used
Stage technology
Linear motor
Ball screw
Ball screw
XY probing accuracy (μm)
±0.8
±2.0
±1.8
Z probing accuracy (μm)
±5.0
±5.0
±5.0
Probing force (kg)
300/400*
60
200/300*
Optical system
ASU/BCU-Ⅱ
ASU/BCU-Ⅱ
ASU/BCU-Ⅱ
Operation system
Windows+VME
Windows+VME
Windows+VME
Keywords:
AOI Machine, Panasonic AOI Machine, SMT AOI Machine,PCB AOI Machine
Contact: Mr Tommy
Phone: +86 13691605420
Tel: +86 -755-85225569
Email: tommy@flason-smt.com
Add: 94#,Guangtian Road,Songgang Street,Bao an District Shenzhen China